INTERFEROMETER

Zygo GPI XP-D

Fisba uPhase

Interferometer with phase shift and integrated 640px x 480px digital camera

• Laser wavelength: 632.8 nm
• PV repeatability: λ / 300
• RMS-repeatability: λ / 10000
• Resolution: λ / 8000
• Beam width vertical: 150 mm
• Beam width plane horizontal: 100 mm
• Beam width plane & radius vertical: 100 mm
• Measurement range radius measurement: 1000 mm

Twyman-Green Interferometer with phase shift

• Laser wavelength: 632.8 nm
• PV repeatability: λ / 400
• RMS repeatability: λ / 6500
• Measurement uncertainly: λ / 35
• Beam width plane: 150 mm
• Beam width plane & radius: 50 mm
• Measurement range radius measurement: 300 mm